• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    There is provided a drive terminal block for a rotary magnetron which comprises a housing with a vacuum-tight rotating connection which extends through a wall of the housing, and a driving device for generating a rotational torque, '' the driven end of the swivel which is outside the housing being configured to connect to the rotating magnetron and the drive end of the swivel that is inside the housing being configured to induce a rotational torque , and the drive device being disposed outside the housing of the drive terminal block and being connected by means of a device for transmitting the rotational torque to the drive end of the rotary union such that the drive device is electrically isolated from the housing and a swivel of the drive terminal block (fig. 1).
    公开号:BE1019093A5
    申请号:E2009/0225
    申请日:2009-04-09
    公开日:2012-03-06
    发明作者:Hans-Juergen Heinrich；Goetz Grosser；Thorsten Sander
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    "Terminal block for a rotating magnetron"
    A drive terminal block for a rotating magnetron, which is of simple construction and easy maintenance, will be described hereinafter.
    In vacuum coating technology, so-called rotary magnetrons are known in which a most often tubular target surrounds a magnet structure, the tubular target being rotatably mounted and drivable such that the target material is removed from the body. uniform way. The rotating magnetron is generally fixed in the vacuum chamber of a vacuum coating plant between two end blocks which are constructed in such a way that they respectively allow the rotational mounting of the tubular target. Most often, different functions are, in this case, assigned to the two terminal blocks. One of the terminal blocks is, in general, embodied as a terminal supply block for supplying the magnetron with cooling water and electrical energy and the other terminal block is designed as a drive terminal block for inducing a torque for to generate the rotation of the tubular target.
    For this purpose, known drive terminal blocks have an electromechanical drive device in the form of an electric motor with gears which induces the rotational torque, for example by means of conical gears, cylindrical gears or toothed belts. This drive must be potential free and must therefore be mounted isolated from the target and the vacuum chamber. Therefore, in the known drive terminal blocks, the drive device is directly mounted in the drive terminal block using insulators. Depending on the height of the process voltage, the cost for potential separation can be very high to reliably obtain that the process voltage applied to the tubular target does not discharge to the drive device or the vacuum chamber.
    Inside the vacuum chamber, the rotational torque is generally transmitted to the target in the vacuum chamber via a coupling element insulated from the drive device disposed inside. of the drive terminal block. Since the drive terminal block combines the functions of rotation induction, electrical insulation and vacuum sealing, the components of the drive terminal block must be produced and mounted with great precision.
    It is necessary to provide an improved drive terminal block for which the production tolerance requirements of the components are lower than for the known drive terminal blocks, the drive device being electrically isolated from the conductive parts of the drive voltage. thus the vacuum chamber and the drive device can be maintained without disassembling the drive terminal block.
    There is provided a drive terminal block for a rotating magnetron which comprises a housing with a vacuum-tight coupling which extends through a wall of the housing and a drive device for generating a rotational torque, the the driven end of the rotating union located outside the housing being configured to be connected to the rotating magnetron and the driving end of the rotating union located inside the housing being configured to induce a rotational torque, and the driving device being disposed outside the housing of the drive terminal block and being connected by means of a torque transmission device to the driving end of the rotary coupling in such a way that the driving device is electrically isolated from the housing and the rotating connection of the drive terminal block.
    The improved maintenance facility of the proposed drive terminal block is mainly achieved because the drive device is no longer disposed within the housing of the drive terminal block. As a result, the drive device, for example the drive motor used, is accessible without dismantling the drive terminal block. It is also possible to have the drive device completely outside the vacuum chamber. In this way the drive device can be arranged much more easily electrically isolated from the tubular target and the vacuum chamber itself.
    The potential exemption of the driving device can be obtained for example because the torque transmission device can be completely manufactured in electrically nonconductive materials such as plastics or ceramics. Instead, it may be provided that the torque transmission device is constructed such that at least a portion of the components of the torque transmission device are made of non-conductive materials which are arranged in such a way that so that there is no continuous conductive connection between the driving device and the driving end of the rotary coupling.
    For example, the torque transmission device may comprise an electrically nonconductive toothed belt that connects a driven wheel of the drive device to a drive wheel disposed on the drive end of the rotational coupling and transmits torque. this way the rotational torque of the drive device to the rotating connection. Other examples are concrete embodiments of the torque transmission device of the chain drives, cardan shafts and similar devices which are well known to those skilled in the art for the transmission of torque.
    Regardless of the manner in which the torque transmission device is concretely achieved, however, it must be ensured that there is no continuous conductive connection between the tubular target and the drive device. This can be done, as in the above example of a toothed belt, since the traction means (eg toothed belt, hinged chain, cardan shaft, etc.) is made of a non-conductive material . Instead or in addition, the components of the driving device and / or the rotating coupling (belt wheels, chain wheels, cross joints, etc.) which are engaged with the traction means can be manufactured in a non-conductive material.
    It can also be provided that at least the connecting shaft of the rotating union, which is in contact with the tubular target, is made of a non-conductive material. If the connecting shaft is made of a conductive material, it must further be provided that the connecting shaft is electrically insulated from the housing of the drive terminal block. This can be achieved, for example, by the fact that the connecting shaft is vacuum-tightly and rotatably disposed in an electrically nonconductive support member which is vacuum-tightly secured in an opening in a wall of the housing. of the drive terminal block.
    When both the housing of the drive terminal block inside the vacuum chamber and the drive device outside the vacuum chamber are arranged at a fixed location relative to the vacuum chamber, no Another measure is necessary to establish the functional connection between the driven wheel of the driving device and the driving end of the rotary joint. However, it can also be provided that the torque transmission device further comprises a support device which is fixedly connected to the housing of the terminal drive block or to the vacuum chamber and one end of which is outside the chamber at vacuum, end on which the driven wheel of the driving device is rotatably mounted.
    The invention will be explained in more detail below on the basis of an exemplary embodiment and a drawing relating thereto. The unique Fig. 1 shows an overview of a drive terminal block for a rotating magnetron which is mounted in a vacuum chamber of a vacuum coating plant.
    Inside the vacuum chamber 1 is the housing 2 of the drive terminal block which is open upwards and therefore toward the atmosphere and which is applied by means of an insulator element 21. vacuum-tight and electrically insulated manner to a chamber wall 11 of the vacuum chamber 1.
    A rotating coupling is rotatably mounted in a vacuum-tight and electrically insulated manner in a wall of the housing 2. The rotary coupling comprises a shaft 31 which is rotatably mounted in rolling bearings 32. The rolling bearings 32 are their side mounted in an insulator bushing 33 which provides electrical insulation of the profiled hollow shaft 31 and rolling bearings 32 relative to the housing 2.
    At the driven end of the profiled hollow shaft 31 located outside the housing 2 and thus inside the vacuum chamber 1 is fixed a tubular cathode 4 of a rotating magnetron, in that a profiled end of an adapter 41 applied to the tubular cathode 4 is inserted into the hollow end of the profiled hollow shaft 31 so that a form-complementary connection is established between the profiled hollow shaft 31 and the adapter 41 so that a rotational torque can be transmitted from the profiled hollow shaft 31 to the adapter 41.
    A support device 5, electrically insulated by an insulator member 51, is applied to the upper end of the drive terminal block on the atmosphere side so that its upper end protrudes in the open air above. the upper wall 11 of the vacuum chamber 1 and its lower end protrudes into the housing 2 of the terminal block drive.
    Outside the vacuum chamber 1 is a driving device, in the embodiment of a geared motor 6, the driven shaft 61 is in operative connection via a gear shaft. clutch 62 made of an electrically nonconductive material with a toothed belt wheel 65 which is disposed on a shaft 63 which is rotatably mounted at the upper end of the support device 5 in rolling bearings 64. As a result, the drive torque which is provided by the driving device 6 on the driven shaft 61 is transmitted via the clutch shaft 62 and the shaft 63 to the toothed belt wheel 65.
    At the lower end of the support device 5 located inside the housing 2 of the drive terminal block is disposed a shaft end 71 in an insulator bushing 72 which, for its part, is fixed by means of a retaining ring 73 on the support device 5. On the shaft end 71 is rotatably mounted a driver 75 on rolling bearings 74. A toothed belt wheel 76 which is made of an electrically non-conductive material is arranged on the coach 75.
    The driving end of the profiled hollow shaft 31 located inside the housing 2 is functionally connected in form complementarity with the driver 75 so that a rotational torque can be transmitted from the belt wheel. toothed 76 to the driver 75, the trainer 75 to the hollow shaft 31 and the profiled hollow shaft 31 to the adapter 41 of the tubular cathode 4. For this purpose, the driver 75 has on its side facing the hollow shaft profiled several cams 77 which engage in recesses 34 corresponding to the front side of the end of the hollow shaft profiled 31 located inside the housing 2 to transmit the torque.
    The toothed belt wheel 65 disposed outside the housing 2 is in operative connection with the toothed belt wheel 76 disposed within the housing 2 by means of a toothed belt 8 which is made of an electrically non-conductive material. As a result, the rotational torque is transmitted from the toothed belt wheel 65 to the toothed belt wheel 76.
    List of part numbers 1 Vacuum chamber 11 Chamber wall 2 Housing 21 Isolator element 31 Profiled hollow shaft 32 Roller bearings 33 Insulator bushing 34 Hollow 4 Tubular cathode 41 Adapter 5 Support device 51 Insulator element 6 Geared Motor 61 Drive Shaft 62 Clutch Shaft 63 Shaft 64 Roller Bearings 65 Gear Belt Wheel 71 Shaft End 72 Insulator Sleeve 73 Retainer Ring 74 Roller Bearings 75 Drive 76 Cogener Belt Wheel 77 Cams 8 Toothed belt
    权利要求:
    Claims (6)
    [1]
    A drive terminal block for a rotating magnetron (4), comprising a housing (2) with a vacuum-tight rotating connection (31) extending through a wall of the housing, and a driving device (6). ) for generating a rotational torque, the driven end of the rotating coupling (31) located outside the housing (2) being made to be connected to the rotating magnetron (4) and the driving end of the coupling rotating member (31) located inside the housing (2) being configured to induce rotational torque, the driving device (6) being arranged outside the housing (2) of the drive end block and being connected by means of a rotational torque transmitting device to the driving end of the rotary joint (31) such that the driving device (6) is electrically isolated from the housing (2) and the coupling turning (31) of blo c drive terminal, characterized in that inside the housing (2), a drive wheel (76) of the rotary coupling (31) is electrically insulated independently of the rotary coupling (31) and the housing (2).
    [2]
    A drive terminal block according to claim 1, characterized in that at least one component of the torque transmission device is made of non-conductive materials and is arranged in such a way that there is no continuous conductive connection between the driving device (6) and the driving end of the rotary coupling (31).
    [3]
    3. Drive terminal block according to claim 2, characterized in that the torque transmission device comprises an electrically non-conductive pulling means (8) which connects the driving device (6) to the rotary coupling (31). ).
    [4]
    4. Drive terminal block according to claim 2 or 3, characterized in that the parts (65, 75) engaged with the traction means (8) are made of a non-conductive material.
    [5]
    5. Terminal block according to any one of the preceding claims, characterized in that the torque transmission device further comprises a support device (5) which is fixedly connected to the housing (2) of the terminal block. drive or to the vacuum chamber (1).
    [6]
    6, terminal block according to claim 5, characterized in that a driven wheel (65) of the driving device (6) is rotatably mounted at the end of the support device (5) located at the outside the vacuum chamber (1).
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    同族专利:
    公开号 | 公开日
    US20090258739A1|2009-10-15|
    US8894522B2|2014-11-25|
    DE102008018609A1|2009-11-12|
    DE102008018609B4|2012-01-19|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US5200049A|1990-08-10|1993-04-06|Viratec Thin Films, Inc.|Cantilever mount for rotating cylindrical magnetrons|
    EP1365436A2|2002-01-18|2003-11-26|VON ARDENNE ANLAGENTECHNIK GmbH|Cylindrical AC/DC Magnetron with compliant drive system and electrical and thermal isolation|
    US4422916A|1981-02-12|1983-12-27|Shatterproof Glass Corporation|Magnetron cathode sputtering apparatus|
    US4525264A|1981-12-07|1985-06-25|Ford Motor Company|Cylindrical post magnetron sputtering system|
    US4445997A|1983-08-17|1984-05-01|Shatterproof Glass Corporation|Rotatable sputtering apparatus|
    US5096562A|1989-11-08|1992-03-17|The Boc Group, Inc.|Rotating cylindrical magnetron structure for large area coating|
    US5100527A|1990-10-18|1992-03-31|Viratec Thin Films, Inc.|Rotating magnetron incorporating a removable cathode|DE102009056241B4|2009-12-01|2012-07-12|Von Ardenne Anlagentechnik Gmbh|Support device for a magnetron arrangement with a rotating target|
    EP2371992B1|2010-04-01|2013-06-05|Applied Materials, Inc.|End-block and sputtering installation|
    DE202014100594U1|2014-02-11|2014-03-10|Von Ardenne Gmbh|End block assembly|
    WO2020164685A1|2019-02-12|2020-08-20|Applied Materials, Inc.|Cathode drive unit, sputtering cathode and method for assembling a cathode drive unit|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE200810018609|DE102008018609B4|2008-04-11|2008-04-11|Drive end block for a rotating magnetron|
    DE102008018609|2008-04-11|
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